INO
CNR
vai_a_storia   vai_a_organizzazione   vai_a_sedi   vai_a_personale   Area Riservata
    English English Version  
 
 

Digital holography microscope as tool for microelectromechanical systems characterization and design

  Articoli su Riviste JCR/ISI  (anno 2005)

Autori:  Coppola G., Iodice M., Finizio A., De Nicola S., Pierattini G., Ferraro P., Magro C., Spoto G

Affiliazione Autori:  Istituto per la Microelettronica e Microsistemi del CNR, Sez. di Napoli, Via Pietro Castellino 111, 80131, Napoli, Italy; Istituto di Cibernetica "E. Caianiello" del CNR, Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy; Istituto Nazionale di Ottica Applicata, Sez. di Napoli, Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy; Si-based optoelectronics Bio & Nanosystems Group STMicroelectronics, Stadale Primosole 50, 95121, Catania, Italy

Riassunto:  Microelectromechanical systems (MEMS) are integrated microdevices or systems combining electrical and mechanical components that can sense, control, and actuate on the microscale and function individually or in arrays to generate effects on the macroscale. MEMS is one of the most promising areas in future computers and machinery, the next logical step in the silicon revolution. Fabricated using integrated circuit (IC)-compatible batch-processing technologies, the small size of MEMS opens a new line of exciting applications, including aerospace, automotive, biological, medical, fluidics, military, optics, and many other areas. We explore the potentialities of a high-resolution optical technique for characterizing MEMS microstructures. The method is based on the application of digital holography as a noncontact metrological tool for inspection and characterization of the microstructure surface morphology. The microstructures under investigation are homogeneous and bimorph polysilicon cantilevers; both structures exhibit an out-of-plane deformation owing to residual stress. The high sensitivity of the proposed method enables us to precisely determine the structure morphology and calculate the intrinsic stress and bending moment, in good agreement with an analytical model. Hence, the proposed technique can be exploited to assess the fabrication process and the functionality as well as the reliability of micromachined structures. Moreover, it is also used as a tuning tool for design and finite-element-based simulation software. (c) 2005 Society of Photo-Optical Instrumentation Engineers.

Rivista/Giornale:  JOURNAL OF MICROLITHOGRAPHY MICROFABRICATION AND MICROSYSTEMS
Volume n.:  4 (1)      Pagine da: 013012-1  a: 013012-9
DOI: 10.1117/1.1857551

*Impact Factor della Rivista: (2005) 1.389   *Citazioni: 6
data tratti da "WEB OF SCIENCE" (marchio registrato di Thomson Reuters) ed aggiornati a:  19/05/2019

Riferimenti visionabili in IsiWeb of Knowledge: (solo per sottoscrittori)
Per visualizzare la scheda dell'articolo su IsiWeb: Clicca qui
Per visualizzare la scheda delle Citazioni dell'articolo su IsiWeb: Clicca qui

INO © Istituto Nazionale di Ottica - Largo Fermi 6, 50125 Firenze | Tel. 05523081 Fax 0552337755 - P.IVA 02118311006     P.E.C.    Info