INO
CNR
vai_a_storia   vai_a_organizzazione   vai_a_sedi   vai_a_personale   Area Riservata
    English English Version  
 
 

An integrated approach for photonic crystal inspection and characterization

  Articoli su Riviste JCR/ISI  (anno 2006)

Autori:  Tiribilli B., Ferraro P., Grilli S., Molesini G., Vannoni M., Vassalli M

Affiliazione Autori:  Istituto Sistemi Complessi, CNR, via Madonna del Piano 10, 50019, Sesto Fno (FI), Italy; Istituto Nazionale di Ottica Applicata, CNR, Via Campi Flegrei 34, 80078 - Pozzuoli, (NA), Italy; Istituto Nazionale di Ottica Applicata, CNR, L.go Fermi 6, 50125 Firenze, Italy

Riassunto:  Photonic crystals are attractive optical materials for controlling and manipulating light. They are of great interest for both fundamental and applied research, and they are expected to find commercial applications soon. In this work digital holography, white light interferometry and atomic force microscopy have been applied to the inspection and characterization of 1D and 2D nanofabricated LiN photonic crystals. Periodic patterns with periods ranging form several microns to a fraction of micron have been accurately analysed. Optical methods allow to explore relatively large areas while atomic force microscopy is well suited for high-resolution inspection of the small features.

Rivista/Giornale:  
Volume n.:        Pagine da: 61880A-1  a: 61880A-8
DOI: 10.1117/12.664930


Riferimenti visionabili in IsiWeb of Knowledge: (solo per sottoscrittori)
Per visualizzare la scheda dell'articolo su IsiWeb: Clicca qui

INO © Istituto Nazionale di Ottica - Largo Fermi 6, 50125 Firenze | Tel. 05523081 Fax 0552337755 - P.IVA 02118311006     P.E.C.    Info