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Analysis of the Actuation of an RF-MEMS by Means of Digital Holography

  Articoli su Riviste NON JCR/ISI  (anno 2009)

Autori:  Coppola G., Striano V., De Nicola S., Finizio A., Ferraro P

Affiliazione Autori:  CNR INO

Riassunto:  Digital holography is employed as non-contact metrological tool for inspection and characterization of a micromechanical shunt switch for microwave applications. The switch is based on a bridge that is actuated via an electrostatic force generated by a DC voltage signal applied between the bridge and the underneath region. The out-of-plane deformation of the bridge has been investigated during the operational conditions in order to measure the warp in the bridge occurring during its actuation. The results reported in this paper are obtained biasing the RF-MEMS with a voltage ramp with a period of 1s and an amplitude of 30 V. Digital Holography allowed to diagnostic and measure an asymmetric deformation of the device during its actuation.

Rivista/Giornale NON ISI:  Journal of holography and speckle
Volume n.:  5      Pagine da: 175  a: 179
DOI: 10.1166/jhs.2009.1012

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