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Gas sensing applications of the inverse spinel zinc tin oxide

  Articoli su Riviste JCR/ISI  (anno 2017)

Autori:  Hemmatzadeh Saeedabada S., Baratto C., Rigoni F., Rozatia S.M., Sberveglieri G., Vojisavljevicc K., Malic B

Affiliazione Autori:  Department of Physics, University of Guilan, Rasht, Iran: SENSOR Lab, CNR INO & University of Brescia, Dept. of Information Engineering, Italy; Jožef Stefan Institute, Electronic Ceramics Department, Ljubljana, Slovenia

Riassunto:  In this work, we prepared zinc stannate (ZTO) thin films by RF sputtering starting from a sintered ceramic target with Zn:Sn ratio 2:1, by varying the argon/oxygen pressures during the deposition process. Thin films were deposited on alumina substrates at 400 degrees C, and subsequently annealed at 600 degrees C in the air. The transparency typical for the as-deposited films was preserved even after their annealing at 600 degrees C in the air, where the high temperature was crucial for the improvement of the crystalline Zn2SnO4 , ZTO phase, as confirmed by Raman measurements. Additionally, the post-deposition thermal treatment resulted in porous ZTO films suitable for gas sensing application. The structural and surface morphological properties of thin films were investigated by Raman spectroscopy, field emission scanning electron microscopy (FE-SEM) and energy dispersive X-ray analysis (EDX). Finally, the gas sensing properties towards nitrogen dioxide, ethanol and acetone have been tested, showing the high potentiality of this material as the gas sensor for ethanol and acetone at 400 degrees C, and nitrogen dioxide at 200 degrees C.

Rivista/Giornale:  MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume n.:  71      Pagine da: 461  a: 469
Ulteriori informazioni:  KV and BM acknowledge the support of Slovenian Research Agency (Programme P2-0105).
DOI: 10.1016/j.mssp.2017.09.006

*Impact Factor della Rivista: (2017) 2.593   *Citazioni: 2
data tratti da "WEB OF SCIENCE" (marchio registrato di Thomson Reuters) ed aggiornati a:  21/07/2019

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